Brooks Instrument Thermal Mass Flow 5850E

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Description

Analog Thermal Mass Flow Controller, 3 – 30,000 sccm, Elastomer Seals

The Brooks Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 – 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Specifications:

Max Pressure Max Temp
Type Full Scale Capacity Accuracy bar psi C F Output
Elastomer Seal Meter / Controller 3 sccm – 30 slpm 1% FS 100 1500 65 150 0-5 Vdc

Product Documentation

Technical Literature:

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